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Elsevier, Thin Solid Films, 1(518), p. 396-398

DOI: 10.1016/j.tsf.2009.06.005

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Si diffusion in magnetron sputtered silicon carbide films deposited on silicon and carbon substrates.

Journal article published in 2009 by W. Gruber, U. Geckle, M. Bruns, H. Schmidt ORCID
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

Thin Solid Films, 518(2009) S.396-98 ; DOI:10.1016/j.tsf.2009.06.005