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Published in

Elsevier, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, (175-177), p. 500-504

DOI: 10.1016/s0168-583x(00)00549-8

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Study of new surface structures created on sapphire by Co ion implantation

Journal article published in 2001 by C. Marques, M. M. Cruz, R. C. da Silva ORCID, E. Alves
This paper is available in a repository.
This paper is available in a repository.

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Abstract

Single crystalline α-Al2O3 was implanted with several fluences of Co ions. Detailed angular scans performed after implantation indicate incorporation of the Co ions into substitutional Al sites for fluences up to 1×1015cm−2. For higher fluences a large amount of defects are produced and new compounds start to form in the implanted region. At a fluence of 5×1017cm−2 the samples displayed both metallic conduction and ferromagnetic behaviour. Annealing in an oxidising atmosphere promote the diffusion of Co into the bulk leaving a Co-rich thin layer at the surface and leading to the formation of a Co–Al–O compound that extends to a depth of 250 nm. After this annealing the magnetic behaviour disappears and the samples become insulating. Annealing in a reducing atmosphere produces a Co-rich layer in the topmost 80 nm of the surface without loss of the ferromagnetic behaviour and the metallic conductivity.