Springer, Applied Physics A: Materials Science and Processing, 4-6(79), p. 1141-1143, 2004
DOI: 10.1007/s00339-004-2687-x
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We report the fabrication and characterization of microelectromechanical systems (MEMS) prototypes based on a microcantilever coated with a NiTi thin film. The NiTi film was deposited by laser ablation and deposition in ultra-high vacuum. The samples were characterized from the mechanical point of view by measuring the resonance frequency of the cantilever as a function of the temperature. Data show a clear phase transition of the NiTi film, with relevant transition temperatures close to those of the bulk, which demonstrates the congruency of the deposition method. We have also developed a technique to control the deflection of the NiTi-coated cantilever by all-optical means, both continuous and pulsed, the latter with typical time scales in the hundreds of s range.