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MAIK Nauka/Interperiodica, Physics of the Solid State, 2(54), p. 394-403
DOI: 10.1134/s1063783412020102
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Chemical and phase compositions of silicon oxide films with nanocrystals prepared by carbon ion implantation
Journal article published in 2012 by
A. V. Boryakov,
D. E. Nikolitchev,
D. I. Tetelbaum,
A. I. Belov,
A. V. Ershov,
A. N. Mikhaylov 
This paper is available in a repository.
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