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American Institute of Physics, Applied Physics Letters, 9(60), p. 1129

DOI: 10.1063/1.106429

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Strain relaxation of compositionally graded InxGa1-xAs buffer layers for modulation‐doped In0.3Ga0.7As/In0.29Al0.71As heterostructures

Journal article published in 1992 by J. C. P. Chang, Jianhui Chen, J. M. Fernandez, H. H. Wieder, K. L. Kavanagh ORCID
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

Modulation‐doped In 0.3 Ga 0.7 As/In 0.29 Al 0.71 As heterostructures have been grown on GaAs substrates by molecular beam epitaxy using a compositionally step‐graded In x Ga 1-x As buffer layer. We found that the buffer layer produces essentially total relaxation with ≪2×106/cm2 dislocations present in the In 0.3 Ga 0.7 As layer. The structural perfection of this layer is reflected in the electrical and galvanomagnetic properties of its two‐dimensional electron‐gas channel which has a sheet‐electron density of 1.2×1012/cm2, peak mobilities of 9 300 cm2/V s at room temperature and 31 000 cm2/V s at 77 K, and a mobility anisotropy of ∼4% along orthogonal 〈110〉 directions.