Published in
2008 Conference on Lasers and Electro-Optics
DOI: 10.1109/cleo.2008.4551588
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Demonstration of an Electronic Photonic Integrated Circuit in a Commercial Scaled Bulk CMOS Process
Journal article published in 2008 by
Miloš A. Popović,
Anatol Khilo,
Charles W. Holzwarth,
Jason S. Orcutt,
Benjamin Moss,
Hanqing Li,
Rajeev J. Ram,
Marcus S. Dahlem 
,
Thomas D. Bonifield,
Vladimir Stojanović,
Franz X. Kaertner,
Franz X. Kartner,
F. X. Kärtner,
Erich P. Ippen,
Judy L. Hoyt
,
Thomas D. Bonifield,
Vladimir Stojanović,
Franz X. Kaertner,
Franz X. Kartner,
F. X. Kärtner,
Erich P. Ippen,
Judy L. Hoyt
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Abstract
We demonstrate the first photonic chip designed in a commercial bulk CMOS process (65 nm node) using standard process layers combined with scalable post-processing, enabling dense photonic integration with high-performance microprocessor electronics.