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Trans Tech Publications, Materials Science Forum, (455-456), p. 20-24
DOI: 10.4028/www.scientific.net/msf.455-456.20
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KrF laser CVD of chromium oxide by photodissociation of Cr(CO)6
Journal article published in 2004 by
Pedro M. Sousa,
António J. Silvestre 
,
N. Popovici,
M. L. Param{\^e}s,
M. L. Paramês,
Olinda Conde
,
N. Popovici,
M. L. Param{\^e}s,
M. L. Paramês,
Olinda Conde
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Abstract
This work reports on the synthesis of chromium oxide thin films prepared by photodissociation of Cr(CO)6 in an oxidizing atmosphere, using a pulsed UV laser (KrF, 248 nm). The experimental conditions which should enable the synthesis of CrO2 are discussed and results on the deposition of CrxOy films on Al2O3 (0001) substrates are presented.