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EDP Sciences, The European Physical Journal Applied Physics, 1(55), p. 11301

DOI: 10.1051/epjap/2011100462

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Effect of hydrogen implantation in 6H-SiC before and after thermal oxidation

Journal article published in 2011 by B. Arghavani Nia, S. Solaymani, A. Ghaderi, D. Agha Aligol, A. Baghizadeh ORCID
This paper is available in a repository.
This paper is available in a repository.

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