An organic-inorganic hybrid polymer, composed of poly(methylsilsesquioxane) (PMSSQ) and poly(4-vinyl benzaldehyde) (PStCHO), is prepared by reversible addition-fragmentation chain transfer (RAFT) polymerization of 4-vinyl benzaldehyde (StCHO) using a macro-chain transfer agent (CTA) based on PMSSQ. The obtained PMSSQ-PStCHO is spin-coated on substrates such as silicon wafers or copper plates to afford aldehyde-functionalized surfaces. Successful Kabachnik-Fields post-polymerization modification (KF-PMR) of the aldehyde-functionalized surfaces is conducted with amines and dialkyl phosphonates, and characterized by surface analysis techniques including IR, energy-dispersive X-ray (EDX), and X-ray photoelectron spectroscopy (XPS) measurements, documenting the installation of -amino phosphonates onto surfaces with practically quantitative conversion of aldehydes. In addition, the generated -amino phosphonates are successfully deprotected to afford the corresponding -amino phosphonic acids on surfaces, which make this route a reliable tool-enabling surface functionalization with -amino phosphonic acids.