American Institute of Physics, Applied Physics Letters, 14(102), p. 141912
DOI: 10.1063/1.4801761
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Nonpolar m-plane ZnO films are deposited on GaN (0002) with a 10 nm Al2O3 interlayer by atomic layer deposition. The growth direction of the ZnO films directly on GaN (0002) is [704] (perpendicular to (101) plane), whereas with the Al2O3 interlayer it changes into [100]. With the Al2O3 interlayer, the m-plane ZnO films are presented and the leakage current of the heterojunctions dramatically reduces. The electroluminescence spectra of the n-ZnO/Al2O3/p-GaN heterojunctions are dominated by a blue emission under forward biases, whereas it is violet under reverse biases.