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IOP Publishing, Applied Physics Express, 11(6), p. 115503, 2013

DOI: 10.7567/apex.6.115503

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Uniform Low-to-High In Composition InGaN Layers Grown on Si

This paper is available in a repository.
This paper is available in a repository.

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Abstract

Uniform, compact, and thick InGaN layers are grown on Si(111) substrates by plasma-assisted molecular beam epitaxy without any buffer layers at low temperatures of around 320 �C. By adjusting the Ga/In flux ratio, InGaN layers with In compositions between 10 and 33% are obtained, providing emission covering the whole visible spectral range. The In composition varies less than 2% over large areas, and the singlecrystalline hexagonal InGaN layers have a well-defined epitaxial relationship with the Si substrate. Photoluminescence is observed up to room temperature, opening the prospect for the direct integration of InGaN light-emitting devices with Si technology.