Published in
Elsevier, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, (272), p. 153-157
DOI: 10.1016/j.nimb.2011.01.054
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Materials modifications using multi-ion processing and lithography system
Journal article published in 2012 by
Bill R. Appleton,
S. Tongay,
M. Lemaitre,
Brent Gila,
Joel Fridmann,
Paul Mazarov,
Jason E. Sanabia,
S. Bauerdick,
Lars Bruchhaus,
Ryo Mimura,
Ralf Jede
This paper is available in a repository.
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