Frontiers in Guided Wave Optics and Optoelectronics
DOI: 10.5772/39533
Optomechatronic Actuators and Manipulation III
DOI: 10.1117/12.754170
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This paper presents the design, fabrication and operation principle of an optical beam steerer for laser fiber coupling based on a MEMS device. The MEMS chip consists on a bi-dimensional movable platform based on uni-dimensional comb drive actuation. An optical lens is assembled onto the mobile platform to focus and steer the light coming from a laser diode and couple it into an optical fiber. Assembly of a complete system and measurements were performed and compared to simulation results. Both the trajectory of the MEMS and resonance frequency measurements agree with the simulated ones.