Zn 1-x Er x O (x=0.0, 0.01, 0.02, 0.03, 0.04, and 0.05) solutions have been synthesized by the sol-gel technique using Zinc acetate dihydrate and Er acetate which were dissolved in methanol and acetyl acetone. Er-doped ZnO nano-particles were obtained from solutions to find phase and crystal structure. Er-doped ZnO films have been deposited onto glass substrate by using sol-gel dip coating system. Obtained nano-particles and films were annealed at various temperatures to find annealing temperature effect on structural, optical, and electrical properties. The crystal structures of the Er-doped ZnO nano-particles and films were characterized using 2- x-ray diffraction (XRD). Optical transmittance spectra of the Eu-doped ZnO films were analyzed at room temperature by using a UV-NIR (Shimadzu-2101 PC). The electrical properties of Er-doped ZnO were considered within wide temperature range from 20 to 200 ºC under the high purity nitrogen (N 2) flow and in the frequency range from 40 Hz to 1 MHz. Category: Nanotechnology