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Optica, Optics Letters, 10(35), p. 1695, 2010

DOI: 10.1364/ol.35.001695

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Femtosecond laser direct patterning of sensing materials toward flexible integration of micronanosensors

Journal article published in 2010 by Li Guo, Hong Xia, Hui-Tao Fan, Yong-Lai Zhang, Qi-Dai Chen, Tong Zhang, Hong-Bo Sun ORCID
This paper is available in a repository.
This paper is available in a repository.

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Abstract

Reported is femtosecond laser direct patterning of sensing materials toward flexible integration of micronanosensors (FIMS), meaning the capability to fabricate multiple functional sensors of smaller size on a nonflat surface of a substrate that is not limited to silicon. As a representative example, a photosensitive SnO(2) colloidal solution (sol) was developed, from which complex micronanostructures were written via a two-photon absorption process. After thermal decomposition of organic components, the patterned SnO(2) microsensors responded to relative humidity (RH) with a variation range of 5 orders of magnitude. FIMS would open a new door for miniaturization of micronanosensors expected in intelligent microsystems.