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American Institute of Physics, Journal of Vacuum Science and Technology B, 3(24), p. 1409

DOI: 10.1116/1.2202122

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Cleaning silicon nitride gratings with liquid immersion

Journal article published in 2006 by Mark Robertson-Tessi, Robert J. Wild ORCID, Alexander D. Cronin, Tim Savas
This paper is available in a repository.
This paper is available in a repository.

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Abstract

We demonstrate a method for cleaning sodium deposits off nanofabricated silicon nitride gratings using liquid immersion without damaging the grating. The possibility of cleaning a grating successfully depends on its physical parameters and the type of liquid to be used. We present calculations on surface tension interactions between a liquid and the bars of the grating, and derive the maximum grating-bar span that will survive immersion.