EVWUDFW SiO nanowires have been synthesized on SiC substrates with liquid phase Fe as a novel catalyst at 1300 -1400ć. The length of SiO nanowires is in the range of several tens to hundreds of micrometers, and the diameters are 40-230 nm. Energy dispersive X-ray analysis shows the element ratio Si: O nanowires as 1:1. However, X-ray-diffraction reveals amorphous structure in SiO nanowires. The formation process of SiO nanowires is related to the solid-liquid-solid growth mechanism. FTIR spectra of SiO nanowires demonstrate two peaks at 1066 and 800 nm, which are different from those of SiO 2 nanowires. Meanwhile, Raman spectrum also shows that the characteristic SiO nanowires (321 and 378 nm) is different from the traditional SiO 2 nanowires. Photoluminescence spectrum of SiO nanowires shows strong absorption peaks at 421 and 520 nm. results indicate SiO nanowires having potential application in the optical field. In recent years, one-dimensional nano-sized materials, such as nanowires, nanoroads and nanotubes, have been investigated extensively due to their particular properties and great potential applications [1]. Silicon and silica nanostructures have attracted considerable attention because of their 1671 The 8 th Pacific Rim International Congress on Advanced Materials and Processing Edited by: Fernand Marquis TMS (The Minerals, Metals & Materials Society), 2013