Dissemin
Language
العربيّة
Deutsch
English
Español
Suomi
Français
한국어
Македонски
Português
Português Brasileiro
Русский
Svenska
Türkçe
简体中文
繁體中文
Login
Dissemin
Papers
Chevolleau et al., 2012
Links
[hal.archives-ouvertes.fr]
Tools
Export citation
×
Format
BibTeX
@inproceedings{Chevolleau2012, author = {Chevolleau, T. and Darnon, M. and Posseme, N. and David, T. and Bouyssou, R. and Bailly, F. and Ducote, J. and Licitra, C. and Verove, C. and Joubert, O.}, month = {apr}, title = {Plasmas Processes Challenges for Porous SiCOH Integration in Advanced Interconnects}, year = {2012} }
Export citation
Search in Google Scholar
Plasmas Processes Challenges for Porous SiCOH Integration in Advanced Interconnects
Proceedings article published in 2012 by
T. Chevolleau
,
M. Darnon
,
N. Posseme
,
T. David
,
R. Bouyssou
,
F. Bailly
,
J. Ducote
,
C. Licitra
,
C. Verove
,
O. Joubert
This paper was not found in any repository; the policy of its publisher is unknown or unclear.
Full text:
Unavailable
Preprint
: policy unknown
Upload
Postprint
: policy unknown
Upload
Published version
: policy unknown
Upload