Silicon nanoparticle formation depending on the discharge conditions of an atmospheric radio-frequency driven microplasma with argon/silane/hydrogen gases

IOP Publishing, Journal of Physics D: Applied Physics, 31(48), p. 314001

Journal article published in 2015 by B. Barwe, F. Riedel, O. E. Cibulka, I. Pelant, J. Benedikt

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