Stimulation of the Diamond Nucleation on Silicon Substrates with a Layer of a Polymeric Precursor in Deposition of Diamond Films by Microwave Plasma

Sedov, V. S.; Ral’chenko, V. G.; Khomich, A. A.; Sizov, A. I.; Zvukova, T. M.; Konov, V. I.

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Springer Verlag, Journal of Superhard Materials, 1(34), p. 37-43

DOI: 10.3103/s1063457612010042

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Stimulation of the Diamond Nucleation on Silicon Substrates with a Layer of a Polymeric Precursor in Deposition of Diamond Films by Microwave Plasma

Journal article published in 2012 by V. S. Sedov, V. G. Ral’chenko, A. A. Khomich

, A. I. Sizov, T. M. Zvukova, V. I. Konov

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Abstract

It has been shown that layers of a certain type of polymers applied to silicon substrates at the thermal destruction form (in parallel with sp(2) coordinated carbon) diamond nanoparticles, which act as nucleation centers of crystallites in the subsequent chemical vapor deposition of diamond. Microcrystalline diamond films have been synthesized from methane-hydrogen mixtures by microwave plasma using poly(naphthylhydrocarbyn) and poly(hydrocarbyn) preceramic polymers. DOI: 10.3103/S1063457612010042

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Stimulation of the Diamond Nucleation on Silicon Substrates with a Layer of a Polymeric Precursor in Deposition of Diamond Films by Microwave Plasma

Abstract