IOP Publishing, Plasma Sources Science and Technology, 6(23), p. 065012, 2014
DOI: 10.1088/0963-0252/23/6/065012
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Power modulation in an atmospheric pressure capacitively coupled radio frequency plasma jet is investigated by numerical modelling. The dynamics of successively pulsing the applied power on and off for a helium–oxygen (∼0.6%) plasma is investigated. The impact of power pulsing on reactive species generation and gas heating is discussed with control opportunities emphasized. Power modulation shows linear control for reactive species and heat flux delivery to a treatment surface above an initial phase of power growth. Power is found to be coupled primarily to the electrons with electron loss rates determining the interference between successive power modulation phases. Plasma decay in the power off phase is characterized by a large initial electron loss in the first 0.5 µs followed by ambipolar decay dominated by ions of opposite charge. Power modulation effects on gas heating show a larger range of temperature control when compared with convection cooling. Reactive oxygen species reaching a treatment surface are shown to typically vary over an order of magnitude for variation in the duty cycle.