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2012 17th Opto-Electronics and Communications Conference

DOI: 10.1109/oecc.2012.6276561

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MEMS-based devices

Proceedings article published in 2012 by Chengkuo Lee ORCID
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

Novel actuation mechanisms for optical MEMS devices have been developed for scanning mirrors and variable optical attenuation (VOA) applications. Recent progress in optical MEMS is highlighted as well.