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American Institute of Physics, Applied Physics Letters, 4(107), p. 043502, 2015

DOI: 10.1063/1.4927592

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The effect of mass loading on spurious modes in micro-resonators

This paper is available in a repository.
This paper is available in a repository.

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Abstract

Dissipation mechanisms severely compromise the performance of micro-resonator based sensors. In this letter, we specifically examine the shift in resonant frequency of spurious modes towards the mode of interest during mass loading. This can result in modal interaction that degrades the response of the sensor. However, by understanding and controlling this effect we can overcome this key barrier to micro-resonator applications.