Published in
American Institute of Physics, Journal of Applied Physics, 3(118), p. 033301, 2015
DOI: 10.1063/1.4926867
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Effects of feedstock availability on the negative ion behavior in a C4F8 inductively coupled plasma
Journal article published in 2015 by
Shu-Xia Zhao,
Fei Gao,
Ya-Ping Wang,
You-Nian Wang,
Annemie Bogaerts 
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
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