Institute of Electrical and Electronics Engineers, IEEE Electron Device Letters, 10(32), p. 1391-1393, 2011
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Thin-film transistors (TFTs) were fabricated using a 20-nm-thick indium molybdenum oxide (IMO) semiconductor layer at room temperature. The grazing incidence x-ray diffraction patterns confirmed that the deposited films are amorphous. The average transmittance (400-2500 nm) and the optical band gap are ~ 88% and 3.95 eV, respectively. The TFTs fabricated on glass substrates showed a saturation mobility of 4.0 cm2/V·s with an I ON/ I OFF ratio of 2 × 103 and a threshold voltage of -1.1 V, which are encouraging preliminary results in order to develop IMO as high-performance semiconductor layer.