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Elsevier, Sensors and Actuators A: Physical, 2(120), p. 370-382

DOI: 10.1016/j.sna.2005.01.007

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Design and Fabrication of a Hybrid Silicon Three-axial Force Sensor for Biomechanical Applications

This paper is available in a repository.
This paper is available in a repository.

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Abstract

This paper presents the design and development of a silicon-based three-axial force sensor to be used in a flexible smart interface for biomechanical measurements. Normal and shear forces are detected by combining responses from four piezoresistors obtained by ion implantation in a high aspect-ratio cross-shape flexible element equipped with a 525 μm high silicon mesa. The mesa is obtained by a subtractive dry etching process of the whole handle layer of an SOI wafer. Piezoresistor size ranges between 6 and 10 μm in width, and between 30 and 50 μm in length. The sensor configuration follows a hybrid integration approach for interconnection and for future electronic circuitry system integration. The sensor ability to measure both normal and shear forces with high linearity (≅99%) and low hysteresis is demonstrated by means of tests performed by applying forces from 0 to 2 N. In this paper the packaging design is also presented and materials for flexible sensor array preliminary assembly are described.