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American Institute of Physics, Applied Physics Letters, 20(92), p. 203103, 2008

DOI: 10.1063/1.2928234

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Fabrication of Graphene p-n-p Junctions with Contactless Top Gates

Journal article published in 2008 by Gang Liu, Jairo Velasco, Jairo Valesco, Wenzhong Bao ORCID, Chun Ning Lau
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

We developed a multi-level lithography process to fabricate graphene p-n-p junctions with the novel geometry of contactless, suspended top gates. This fabrication procedure minimizes damage or doping to the single atomic layer, which is only exposed to conventional resists and developers. The process does not require special equipment for depositing gate dielectrics or releasing sacrificial layers, and is compatible with annealing procedures that improve device mobility. Using this technique, we fabricate graphene devices with suspended local top gates, where the creation of high quality graphene p-n-p junctions is confirmed by transport data at zero and high magnetic fields.