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EDP Sciences, MATEC Web of Conferences, (8), p. 05005

DOI: 10.1051/matecconf/20130805005

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Ship-in-a-Bottle Biomicrochips Fabricated by Hybrid Femtosecond Laser Processing

Journal article published in 2013 by Koji Sugioka, Dong Wu, Katsumi Midorikawa
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

We demonstrate fabrication of highly functional biomicrochips by hybrid femtosecond laser processing. In this process, 3D microfluidic structures are first formed inside photosensitive glass by femtosecond laser direct writing followed by thermal treatment and successive chemical wet etching. Then, functional microcomponents are integrated inside the fabricated microfluidic structures by two-photon photopolyerization. We term the fabricated microchips ship-in-a-bottle biomicrochips