Dissemin is shutting down on January 1st, 2025

Published in

Institute of Electrical and Electronics Engineers, IEEE Electron Device Letters, 11(29), p. 1187-1189, 2008

DOI: 10.1109/led.2008.2005211

Links

Tools

Export citation

Search in Google Scholar

Demonstration of AlGaN/GaN High-Electron-Mobility Transistors Grown by Molecular Beam Epitaxy on Si(110)

This paper is available in a repository.
This paper is available in a repository.

Full text: Download

Green circle
Preprint: archiving allowed
Green circle
Postprint: archiving allowed
Red circle
Published version: archiving forbidden
Data provided by SHERPA/RoMEO

Abstract

The growth of AlGaN/GaN-based heterostructure on Si(110) substrates by molecular beam epitaxy using ammonia as the nitrogen precursor is reported. The structural, optical, and electrical properties of such heterostructure are assessed and are quite similar to the ones obtained on Si(111). A 2-D electron gas is formed at the Al0.3Ga0.7N/GaN interface with a sheet carrier density of 9.6 times 1012 cm-2 and a mobility of 1980 cm2/V middots at room temperature. Preliminary results concerning high-electron-mobility-transistor static characteristics are presented and compared with that of devices realized on other orientations of silicon.