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Elsevier, Sensors and Actuators A: Physical, 1-2(99), p. 160-164

DOI: 10.1016/s0924-4247(01)00909-8

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Microstructural information from optical properties of LPCVD silicon films annealed at low temperature

Journal article published in 2002 by M. Gartner, M. Modreanu ORCID, C. Cobianu, R. Gavrila, M. Danila
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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