Published in
Elsevier, Sensors and Actuators A: Physical, 1-2(99), p. 31-34
DOI: 10.1016/s0924-4247(01)00886-x
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Correlation between epitaxial growth conditions of 3C–SiC thin films on Si and mechanical behavior of 3C–SiC self-suspended membranes
Journal article published in 2002 by
C. Gourbeyre,
T. Chassagne 
,
M. Le Berre,
G. Ferro,
E. Gautier,
Y. Monteil,
D. Barbier
,
M. Le Berre,
G. Ferro,
E. Gautier,
Y. Monteil,
D. Barbier
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