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Elsevier, Physica C: Superconductivity and its Applications, (372-376), p. 587-589

DOI: 10.1016/s0921-4534(02)00801-8

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High-quality reproducible PLD Y–Ba–Cu–O:Ag thin films up to 4 inch diameter for microwave applications

Journal article published in 2002 by Michael Lorenz ORCID, Holger Hochmuth, Dieter Natusch, Marius Grundmann ORCID
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

Large-area pulsed laser deposition (PLD) has reached a state in terms of film quality and reproducibility which makes possible now real applications of PLD-YBa2Cu3O7−δ (YBCO) thin films on both sides of R-plane sapphire substrates as HTSC devices in mobile communication systems. Bandpass filters optimized from PLD-YBCO thin films presently fulfill the requirements of the main national companies which are active in future communication techniques. A relatively simple PLD arrangement with fixed laser plume and rotating substrate, with an offset between the laser plume and the center of the substrate is employed to deposit laterally homogeneous 4 inch diameter Ag-doped YBCO thin films. With the experience of more than 1000 double-sided 3 inch diameter films a high degree of homogeneity and reproducibility of jc and Rs is reached. The extension up to 8 inch substrate diameter will increase the productivity of the flexible PLD technique considerably.