A simple and fast method was developed to determine the quantum efficiency and short circuit current of thin-film silicon solar cells prepared on periodically or randomly textured surfaces. The optics was studied for microcrystalline thin-film silicon solar cells with integrated periodic and random surface textures. Rigorous Coupled Wave Analysis (RCWA) was used to investigate the behaviour of the solar cells. The analysis of the periodic and random textured substrates allows for deriving optimal surface textures. Furthermore, light trapping in periodic and randomly textured substrates will be compared.