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Optical Engineering for Sensing and Nanotechnology (ICOSN 2001)

DOI: 10.1117/12.427084

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Nanolithography on silicon surface using a tuning fork STM/AFM

Proceedings article published in 2001 by S. Y. Lin, C. C. Fan, D. P. Tsai, Din Ping Hsia Yu Lin; Chi Ching Fang; Tsai, F. S. Chien ORCID, S. Gwo, Wen-Feng Hsieh, H. Y.; Fan C C.; Tsai D P.; Chien F S.-S.;Gwo S Lin
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

SPIE vol. 4416, 354-359 ; 物理學系 ; 理學院 ; 專書