Published in
Elsevier, Surface and Coatings Technology, (108-109), p. 236-240
DOI: 10.1016/s0257-8972(98)00620-3
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Physical, structural and mechanical characterization of Ti1−xSixNy films
Journal article published in 1998 by
F. Vaz 
,
L. Rebouta,
S. Ramos,
M. F. da Silva,
Da Silva,
J. C. Soares
,
L. Rebouta,
S. Ramos,
M. F. da Silva,
Da Silva,
J. C. Soares
This paper is available in a repository.
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