A thin titania sol-gel layer was prepared on thermal oxide silica-on-silicon and borosilicate surfaces with spin-coating techniques under cold (room temperature) processing conditions. The physical structure and chemical uniformity of these layers were examined by a series of spectroscopic (FTIR, UV-VIS spectroscopy and ellipsometry) and microscopic (light microscopy, SEM and EDS) techniques. Selective binding with hydroxy-containing (-OH) organic compounds is explored. (C) 2012 Optical Society of America