Patterned close-packed nanoparticle arrays are fabricated using lithography and self-assembly. Microcontact printing is used to selectively transfer ordered nanoparticle monolayers, which are self-assembled at the air/water interface, onto relief structures, which are defined lithographically. The morphology and position of the nanoparticle arrays are determined by the relief structures, while the internal order of the arrays is achieved through the self-assembly process and is maintained during the transfer.