IOP Publishing, Journal of Optics A: Pure and Applied Optics, 7(8), p. S561-S566, 2006
DOI: 10.1088/1464-4258/8/7/s41
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We present highly sensitive optical biosensors able to be fully integrated in lab-on-a-chip microsystems using standard CMOS compatible processes. These optical biosensors are based on integrated Mach–Zehnder interferometers, which have been designed to have high surface sensitivity and monomode behaviour. As a biosensing application of the devices we show the real-time detection of the covalent immobilization and hybridization of DNA strands without labelling. In order to achieve a lab-on-a-chip portable microsystem, we present the integration of the sensor with a CMOS compatible microfluidic system using SU-8 photolithography patterned layers.