Micro powder injection molding ( μPIM) is a potential manufacturing process for microstructured components used in Microsystems Technology (MST). In this paper, the replication of 316L stainless steel microstructure by μPIM was studied. The feedstock comprised of 316L stainless steel and a wax-based binder enhanced with low-density polyethylene to improve green strength for demolding. The feedstock was characterized to enable the selection of suitable processing parameters. The effects of melt temperature, mold temperature and packing pressure on the filling, microstructure replication and demolding were discussed. The results show that 316L stainless steel microstructures could be successfully replicated through the μPIM route.