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Elsevier, Microelectronic Engineering, 8(88), p. 1811-1813

DOI: 10.1016/j.mee.2011.01.045

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A Capacitive Tactile Sensor Array for Surface Texture Discrimination

Journal article published in 2011 by Haseena Bashir Muhammad, Carmine Tommaso Recchiuto, Calogero Maria Oddo ORCID, Lucia Beccai, Carl J. Anthony, Michael J. Adams, Maria Chiara Carrozza, Mike C. L. Ward
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This paper is available in a repository.

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Abstract

This paper presents a silicon MEMS based capacitive sensing array, which has the ability to resolve forces in the sub mN range, provides directional response to applied loading and has the ability to differentiate between surface textures. Texture recognition is achieved by scanning surfaces over the sensing array and assessing the frequency spectrum of the sensor outputs.