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American Chemical Society, Langmuir, 40(29), p. 12483-12489, 2013

DOI: 10.1021/la402742f

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Nonvolatile Flash Memory Based on Biologically Integrated Hierarchical Nanostructures

This paper is available in a repository.
This paper is available in a repository.

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Abstract

The first six peptides of multifunctional titanium binding peptide-1 bestowed recombinant L-ferritin, minT1-LF, was genetically engineered and used to fabricate multilayered nanoparticle architecture. Multifunctionality of minT1-LF enables specific binding of nanoparticle-accommodated minT1-LF to the silicon substrate surface and wet biochemical fabrication of gate oxide layer by its biomineralization activity. Three-dimensional (3D) nanoparticle architecture with multi-layered structure was fabricated by the biological layer-by-layer method and embedded in a metal-oxide-semiconductor device structure as a charge storage node of flash memory device. The 3D-integrated multilayered nanoparticle architecture successfully worked as a charge storage node in flash memory devices that exhibited improved charge storage capacity compared with that of conventional monolayer structure device.