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2006 21st IEEE Non-Volatile Semiconductor Memory Workshop

DOI: 10.1109/.2006.1629491

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Charge Trapping Memory Cell of TANOS (Si-Oxide-SiN-Al2O3-TaN) Structure Compatible to Conventional NAND Flash Memory

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This paper is available in a repository.

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Abstract

To realize TANOS-NAND flash memory, key requirements like program/erase speed, read retention, and program disturb window should be satisfied. In this work, we present 63 nm NAND-type TANOS cells to satisfy all the requirements and to replace floating-gate cells in conventional NAND flash memory without changing a circuit design and a sensing window