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Elsevier, Carbon, (81), p. 96-104

DOI: 10.1016/j.carbon.2014.09.029

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Assessment of H-intercalated graphene for microwave FETs through material characterization and electron transport studies

Journal article published in 2015 by M. Winters, O. Habibpour, I. G. Ivanov, J. Hassan, E. Janzén, H. Zirath, N. Rorsman ORCID
This paper is available in a repository.
This paper is available in a repository.

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Abstract

Epitaxial graphene is grown on semi-insulating (SI) 4H-SiC in a hot wall CVD reactor by graphitization and in-situ intercalation with (H)ydrogen. A holistic material characterization is performed in order to ascertain the number of layers, layer uniformity, and electron transport properties of the epi-layers via electronic test structures and Raman spectroscopy. Bilayer graphene field effect transistors (GFETs) are fabricated using a full electron beam lithography (EBL) process which is optimized for low contact resistances of . Mobilities of order are achieved on bilayer samples after fabrication. The devices demonstrate high transconductance and high current density . The output conductance at the bias of maximum transconductance is . The GFETs demonstrate an extrinsic and of 20 and , respectively and show power gain at in a system, which is the highest reported to date.