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Published in

American Institute of Physics, Journal of Applied Physics, 6(105), p. 063305

DOI: 10.1063/1.3095760

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Modeling of chemical processes in the low pressure capacitive radio frequency discharges in a mixture of Ar/C2H2

This paper is available in a repository.
This paper is available in a repository.

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Abstract

We study the properties of a capacitive 13.56 MHz discharge with a mixture of Ar / C 2 H 2 taking into account the plasmochemistry and growth of heavy hydrocarbons. A hybrid model was developed to combine the kinetic description for electron motion and the fluid approach for negative and positive ion transports and plasmochemical processes. A significant change in plasma parameters related to injection of 5.8% portion of acetylene in argon was observed and analyzed. We found that the electronegativity of the mixture is about 30%. The densities of negatively and positively charged heavy hydrocarbons are sufficiently large to be precursors for the formation of nanoparticles in the discharge volume.