Published in
Elsevier, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1-2(253), p. 59-62
DOI: 10.1016/j.nimb.2006.10.014
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The effect of thermal treatments on the local geometry around indium in In and In+C high dose implanted Si
Journal article published in 2006 by
F. d’Acapito,
Y. Shimizu,
S. Scalese,
M. Italia,
P. Alippi 
,
S. Grasso
,
S. Grasso
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