Published in
Elsevier, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1-2(253), p. 1-8
DOI: 10.1016/j.nimb.2006.10.004
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Ultra-shallow junction by laser annealing: Integration issues and modelling
Journal article published in 2006 by
Antonino La Magna,
Paola Alippi 
,
Ioannis Deretzis,
Vittorio Privitera,
Guglielmo Fortunato,
Luigi Mariucci,
Angelo Magrì,
Edouard Monakhov,
Bengt Svensson
,
Ioannis Deretzis,
Vittorio Privitera,
Guglielmo Fortunato,
Luigi Mariucci,
Angelo Magrì,
Edouard Monakhov,
Bengt Svensson
This paper was not found in any repository, but could be made available legally by the author.
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