Published in
Elsevier, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1-2(249), p. 193-195
DOI: 10.1016/j.nimb.2006.03.112
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Formation of neon induced cavities in silicon by plasma based ion implantation
Journal article published in 2006 by
S. Peripolli,
L. Amaral,
E. Oliviero 
,
M. L. David,
M. F. Beaufort,
J. F. Barbot,
L. Pichon ,
M. Drouet,
P. F. P. Fichtner ,
S. E. Donnelly
,
M. L. David,
M. F. Beaufort,
J. F. Barbot,
L. Pichon ,
M. Drouet,
P. F. P. Fichtner ,
S. E. Donnelly
This paper was not found in any repository, but could be made available legally by the author.
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