Published in
Elsevier, Microelectronics Reliability, 5(55), p. 771-782, 2015
DOI: 10.1016/j.microrel.2015.02.012
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Multiphysics modeling approach for micro electro–thermo–mechanical actuator: Failure mechanisms coupled analysis
Journal article published in 2015 by
Jinling Wang,
Shengkui Zeng,
Vadim V. Silberschmidt 
,
Jianbin Guo
,
Jianbin Guo
This paper is available in a repository.
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