Published in

Elsevier, Microelectronics Reliability, 9-11(50), p. 1857-1860

DOI: 10.1016/j.microrel.2010.07.068

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Radiation effects in nitride read-only memories

This paper is available in a repository.
This paper is available in a repository.

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Abstract

We report on the influence of different types of radiation on the nitride read-only memories (NROM®). The memory cells were irradiated by light ions (Boron), X-rays and γ-rays. Memory transistor parameters, such as threshold voltage and subthreshold drain leakage were studied as a function of the accumulated radiation dose and compared to the as-programmed (-erased) devices parameters. Their time evolution was registered in the range from few hours up to 5months after the irradiation. The NROM® cells showed good radiation robustness up to high accumulated doses. Sufficient program margin (difference of threshold voltage in the programmed state and the read-out voltage level) remained after γ or X irradiation for absorbed doses exceeding 50krad(Si) and 100krad(Si), respectively. For Boron irradiation, the programmed devices remained stable up to the fluence of 1011ions/cm2 (equivalent to 1Mrad(Si) of TID tolerance).