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American Institute of Physics, Journal of Applied Physics, 5(110), p. 054503

DOI: 10.1063/1.3632074

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Light-induced resistance effect of Pd doped carbon film/SiO2/Si

Journal article published in 2011 by Ming Ma ORCID, Ming, Qingzhong Xue, Jianpeng Li, Yuhua Zhen, Sheng Wang
This paper is available in a repository.
This paper is available in a repository.

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Abstract

The Pd doped amorphous carbon (a-C:Pd) films were deposited on n-Si substrates with a native SiO2 layer using direct current magnetron sputtering. The light-induced spatial sensitivity of the resistance of the a-C:Pd/SiO2/Si structure was investigated. It is found that the a-C:Pd/SiO2/Si shows a huge resistance change (~15 000%) when the different positions of the sample surface were illuminated by a laser. The light-induced spatial sensitivity of the resistance of the a-C:Pd/SiO2/Si is attributed to the eminent photosensitivity of the a-C:Pd/SiO2/Si structure which is caused by the Pd doping and the different carrier density distribution in the illuminated and unilluminated regions.